Photomask Technical Information | Takeda Tokyo Process Service Co., Ltd.
Japanese Chinese
JP / CH


Photomask Technical Information

Chrome glass mask with pellicles

A pellicle is a mask with a dustproof protective cover that protects the mask from foreign matter used in chrome masks for projection exposure.

Features

Since the debris is out of focus and does not form an image, it allows for avoiding pattern defects.

Chrome glass mask with pellicles

Anti-static breakdown chrome glass mask

Special materials can be used to suppress the breakdown of chrome metal due to static electricity.

Features

Suppressing electrostatic breakdown leads to improved yield.

Anti-static breakdown chrome glass mask

Accuracy calibration plate

Calibration plates are products used for daily inspection and accuracy correction of various types of equipment.
Dot, grid, and line chart patterns are the most common pattern shapes, but they can also be designed to other specifications.
The main applications are checking the positional accuracy of drive devices and the resolution of optical devices, and we have delivered many of these products to customers in the factory automation field.

Accuracy calibration plate

Resist original plate

A resist original plate is a product in which a three-dimensional structure is formed using photoresist techniques. We have considerable experience with resin molds and electroformed molds.
We leverage the technical expertise we have from photomask fabrication to create high-definition resists. We can also accommodate larger sizes, so please feel free to consult with us.

Resist original plate
 

Coating

A special coating improves the mold-release capabilities of chrome surfaces.

Item Specifications Notes
Film quality High adhesion fluorine coating
Film thickness 10~20nm
Film hardness Pencil hardness of 5H or higher (JIS5600K) JIS5600K Pencil hardness tester
Water repellency Contact angle 100° min.
Transmittance 99% or better at 365nm wavelength (relative to substrate) Spectrophotometer
Solvent resistance Solvent IPA MEK Acetone Ethanol 500g/cm³ rubbing test
Water repellency 1 hour spot test
Chemical resistance Alkali resistance: 5% KOH solution Acid resistance: H2SO4 (96% concentration) 1 hour spot test
No changes No changes
Supported sizes 3 x 3~ (units: inches)
scrollable

Coating Comparison

Without coating
Without coating
With coating
With coating


We can manufacture various types of masks starting from a single sheet.

Are you looking to have a single prototype piece made? We are equipped to flexibly accommodate small lot orders and other requests. Please do not hesitate to contact us.



Inquiries