Photomask Technical Information
Chrome glass mask with pellicles
A pellicle is a mask with a dustproof protective cover that protects the mask from foreign matter used in chrome masks for projection exposure.
Features
Since the debris is out of focus and does not form an image, it allows for avoiding pattern defects.
Anti-static breakdown chrome glass mask
Special materials can be used to suppress the breakdown of chrome metal due to static electricity.
Features
Suppressing electrostatic breakdown leads to improved yield.
Accuracy calibration plate
Calibration plates are products used for daily inspection and accuracy correction of various types of equipment.
Dot, grid, and line chart patterns are the most common pattern shapes, but they can also be designed to other specifications.
The main applications are checking the positional accuracy of drive devices and the resolution of optical devices, and we have delivered many of these products to customers in the factory automation field.
Resist original plate
A resist original plate is a product in which a three-dimensional structure is formed using photoresist techniques. We have considerable experience with resin molds and electroformed molds.
We leverage the technical expertise we have from photomask fabrication to create high-definition resists. We can also accommodate larger sizes, so please feel free to consult with us.
Coating
A special coating improves the mold-release capabilities of chrome surfaces.
Item | Specifications | Notes | ||||
---|---|---|---|---|---|---|
Film quality | High adhesion fluorine coating | |||||
Film thickness | 10~20nm | |||||
Film hardness | Pencil hardness of 5H or higher (JIS5600K) | JIS5600K Pencil hardness tester | ||||
Water repellency | Contact angle 100° min. | |||||
Transmittance | 99% or better at 365nm wavelength (relative to substrate) | Spectrophotometer | ||||
Solvent resistance | Solvent | IPA | MEK | Acetone | Ethanol | 500g/cm³ rubbing test |
Water repellency | ◎ | ◎ | ◎ | ◎ | 1 hour spot test | |
Chemical resistance | Alkali resistance: 5% KOH solution | Acid resistance: H2SO4 (96% concentration) | 1 hour spot test | |||
No changes | No changes | |||||
Supported sizes | 3 x 3~ (units: inches) |
Coating Comparison
We can manufacture various types of masks starting from a single sheet.
Are you looking to have a single prototype piece made? We are equipped to flexibly accommodate small lot orders and other requests. Please do not hesitate to contact us.